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8486407000
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- - Pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates |
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8486409000
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- - Other |
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8486901100
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- - - Of apparatus for rapid heating of semiconductor wafers |
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8486901200
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- - - Of spin dryers for semiconductor wafer processing |
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8486901300
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- - - Of machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers |
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8486901400
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- - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:- - - - Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine tools |
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8486901500
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- - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:- - - - Other |
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8486901600
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- - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:- - - Of grinding, polishing and lapping machines for processing of semiconductor wafers |
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8486901700
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- - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:- - - Of apparatus for growing or pulling monocrystal semiconductor boules |
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8486901900
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- - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:- - - Other |
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8486902100
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- - - Of chemical vapour deposition apparatus for semiconductor production |
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8486902200
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- - - Of epitaxial deposition machines for semiconductor wafers; of spinners for coating photographic emulsions on semiconductor wafers |
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8486902300
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- - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: - - - Of ion implanters for doping semiconductor materials; of apparatus for physical deposition by sputtering on semiconductor wafers; of phy |
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8486902400
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- - - Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry-etching patterns on semiconductor materials: - - - - Tool holders and self-o |
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8486902500
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- - - Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry-etching patterns on semiconductor materials: - - - - Other |